发明名称 AIR-RELEASABLE FILTER DEVICE
摘要 <p>[Summary] [Problems] To provide a filter apparatus improved in operability and maintainability during an air releasing operation for a filter apparatus by promoting a reduction in the size of a filter apparatus capable releasing air for a chemical solution. [Means for solving the problems] The holder (3) of a filter apparatus (1) comprises a front panel (5) and a rear panel (7) vertically positioned parallel with each other. The front panel (5) and the rear panel (7) are connected to each other through a connection portion capable of forming one of the upper panel (9), the side panel (109), and the bottom panel (209) of the holder. A center cutout (11) for rotatably engaging the fluid inlet of the filter body of the filter is formed in the front panel (5) of the holder (3) at a position corresponding to the fluid inlet of the filter body when the filter body is assembled with the holder (3). The fluid inlet (3) for injecting a chemical solution to be filtrated through the filter body (13) is formed in the filter body (13) at a position where the rotating axis is located. A fluid outlet (17) for feeding the filtrated chemical solution from the filter body (13) to a nozzle and discharging the air accumulated in the filter body (13) is formed in the filter body at a position near its circumference.</p>
申请公布号 EP2060309(B1) 申请公布日期 2015.09.16
申请号 EP20070792457 申请日期 2007.08.13
申请人 ENTEGRIS, INC. 发明人 KUWABARA, HIROKAZU
分类号 B01D29/00;B01D29/11;B41J2/175 主分类号 B01D29/00
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