| 摘要 |
PROBLEM TO BE SOLVED: To provide a high accuracy three-dimensional coordinate measuring instrument capable of manufacturing with simple constitution and at low manufacturing cost.SOLUTION: A three-dimensional coordinate measuring instrument measures a measured object on a base 11 by using a measurement probe 51 that is moved by a movement mechanism 31, 60, 70, 80 arranged across the base 11. The movement mechanism 31, 60, 70, 80 includes on one side a linear guide having a driving unit movable with respect to the base 11, and on the other side an air bearing mechanism 80 that is moved parallel with the linear guide. |
