发明名称 TAKING-OUT OF SHEET FROM SURFACE OF MELT USING GAS JET
摘要 PROBLEM TO BE SOLVED: To provide a method of stabilizing a meniscus between a sheet and a melt for taking the sheet out from a surface of the melt without dripping the melt when a silicon sheet is formed by drawing the sheet horizontally out of the melt.SOLUTION: There is provided a sheet formation device that includes a container 16 holding a melt 10 as a material, a cooling plate which is arranged in proximity to the melt 10, and configured to form a sheet 13 of the material horizontally on the melt 10, and a first gas jet 22 which is configured to direct a gas to an edge of the container 16, and stabilizes a meniscus by raising local pressure in the meniscus 27 by a collision of a gas from the first gas jet 22, so that a sheet can be formed without dripping the melt 10. The sheet formation device may be provided with a second gas jet for balancing a vertical component of collision force from the gas jet 22 above the sheet 13 together with the first gas jet 22 for stabilizing the meniscus 27.
申请公布号 JP2015157757(A) 申请公布日期 2015.09.03
申请号 JP20150084457 申请日期 2015.04.16
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC 发明人 PETER L KELLERMAN;GREGORY D THRONSON;SUN DAWEI
分类号 C30B29/06;C30B15/06;C30B29/52 主分类号 C30B29/06
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