METHOD OF OXIDIZING TREATMENT OF TRANSITION METAL FILM AND OXIDIZING TREATMENT DEVICE

摘要

In this method of oxidizing treatment of a transition metal film for oxidizing a film containing a transition metal on the surface of an object to be treated, plasma of gas containing at least oxygen is generated, electrons are donated to neutralize the active species of oxygen in the plasma, neutral particles of the oxygen atoms are generated, and the neutral particles are irradiated onto the film containing the transition metal.