DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING PRODUCTS

摘要

This disclosure provides a detection apparatus configured to detect a moire pattern generated by grid patterns having grid pitches different from each other including: an image-pickup unit configured to pick up an image of the moire pattern; an imaging optical system configured to cause the image-pickup unit to image the moire pattern; and a processing unit configured to process an image-pickup result of the moire pattern imaged by the image-pickup unit, wherein a mark including a plurality of patterns having a width not larger than the resolving power of the imaging optical system arranged in a measuring direction and changed in duty ratio between the widths and intervals of the plurality of patterns is imaged by the image-pickup unit, and the processing unit evaluates the detection apparatus by processing the image-pickup result of the mark picked up by the image-pickup unit.

主权项

1. A detection apparatus configured to detect a moire pattern generated by grid patterns having grid pitches different from each other comprising:
an image-pickup unit configured to pick up an image of the moire pattern; an imaging optical system configured to form the image of the moire pattern on the image-pickup unit; and a processing unit configured to process an image-pickup result of the moire pattern picked up by the image-pickup unit, wherein the image pickup unit picks up an image of a mark including a plurality of patterns having a width not larger than a resolving power of the imaging optical system arranged in a measuring direction and changed in duty ratio between the widths and intervals of the plurality of patterns, and the processing unit evaluates the detection apparatus by processing the image-pickup result of the mark picked up by the image-pickup unit.