| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle structure which allows reliable retention in and fixation to a tray during containment, transport and storage and a method of taking out a pellicle from a storage container easily without distortion or deflection in adhering to a photomask or the like.SOLUTION: In a large pellicle structure with a surface area of a pellicle film 3 of 10,000 cmor greater, a frame body 1 has a rectangular shape, and a protective film 5 has a first hold-down margin protruded outside more than the frame body. The first hold-down margin is located at a position on two sides including one apex of the frame body and has an L-like shape along the shape of the frame body. A method of taking out a pellicle from a storage container includes a step of peeling the protective film at an interface between an adhesive material layer and the protective film while the protective film is fixed to the tray, from the large pellicle storage structure which consists of a tray 6 and a lid 7 and is fixed to the tray with an adhesive tape 9 at least along individual sides of the first hold-down margin.</p> |
