发明名称 半導体ウエハ加工用テープの製造方法及び半導体ウエハ加工用テープ
摘要 <p><P>PROBLEM TO BE SOLVED: To efficiently manufacture a semiconductor wafer processing tape by applying an adhesive only to required portions and reducing cutting processes of an adhesive layer as far as possible, as for a method of manufacturing the semiconductor wafer processing tape and the semiconductor processing tape manufactured by the method. <P>SOLUTION: The semiconductor wafer processing tape 10 is manufactured by the manufacturing method including a printing process for forming the adhesive layer 12 by printing a die bonding adhesive on a resin film (support film 11) so as to have a printed area almost equal to or larger than the size of a semiconductor wafer, a drying process for drying the adhesive layer 12, and a sticking process for sticking a dicing tape 15 to the surface opposite to the resin film on the adhesive layer 12 formed on the resin film. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5767478(B2) 申请公布日期 2015.08.19
申请号 JP20110014653 申请日期 2011.01.27
申请人 发明人
分类号 H01L21/301;C09J7/02;C09J201/00 主分类号 H01L21/301
代理机构 代理人
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