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发明名称
使轴对称以改良流动传导性和均匀度的在线去耦合电浆源腔室之硬体设计;INLINE DPS CHAMBER HARDWARE DESIGN TO ENABLE AXIS SYMMETRY FOR IMPROVED FLOW CONDUCTANCE AND UNIFORMITY
摘要
本揭露书大体关于用于在处理腔室中在电场、气流及热分布中对称的设备及方法,以达成处理均匀性。本揭露书的实施例包含电浆处理腔室,具有沿着相同轴而对准之电浆源、基材支撑组件及真空泵,以在电浆处理腔室中产生实质对称的流动路径、电场及热分布,导致改善的处理均匀性和减少的歪斜。
申请公布号
TW201532116
申请公布日期
2015.08.16
申请号
TW104102861
申请日期
2015.01.28
申请人
应用材料股份有限公司 APPLIED MATERIALS, INC.
发明人
恩盖叶安德鲁 NGUYEN, ANDREW;比许瓦那尤甘南达萨罗德 VISHWANATH, YOGANANDA SARODE;邱汤姆K CHO, TOM K.
分类号
H01J37/32(2006.01)
主分类号
H01J37/32(2006.01)
代理机构
代理人
蔡坤财李世章
主权项
地址
美国 US
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