METHOD FOR SMOOTHING A PERFLUORO ALKOXY ALKANE FILM SURFACE

摘要

Method for increasing the smoothness of the free surface area of a PFA film, provided on a component by sequentially exposing it to a temperature higher than its melting temperature so as to melt at least the free surface area, lowering the temperature to solidify the melted portion, remelting the free surface area by exposing it to a temperature of at least the PFA melting temperature and again lowering the temperature. The PFA film may be provided on Al2O3, Ni or NiF2 film.

主权项

1. A method for smoothing a film surface, comprising the steps of:
preparing a component having a film containing perfluoro alkoxy alkane (PFA) represented by formula 1 in which Rf is a perfluoro alkyl group and m and n are both positive integers; exposing the component to an atmosphere with a temperature higher than a melting temperature of said PFA so as to melt at least a free surface area of the film; exposing the component to the atmosphere with a temperature lower than the melting temperature of said PFA so as to solidify at least a portion of said free surface area; exposing the component to an atmosphere of at least the melting temperature of said PFA so as to re-melt at least the free surface area; and lowering a temperature of the atmosphere sufficiently lower than the melting temperature of PFA so as to increase smoothness of the free surface area of the film.