发明名称 Method for machining seed rods for use in a chemical vapor deposition polysilicon reactor
摘要 A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels.
申请公布号 US9102035(B2) 申请公布日期 2015.08.11
申请号 US201213417792 申请日期 2012.03.12
申请人 MEMC Electronics Materials S.p.A. 发明人 Bovo Rodolfo;Molino Paolo
分类号 B24B49/12;B24B41/06;B24B1/00;B24B19/00;B24B7/16 主分类号 B24B49/12
代理机构 Armstrong Teasdale LLP 代理人 Armstrong Teasdale LLP
主权项 1. A method for machining a profile into a silicon seed rod using a machine, the silicon seed rod used in a chemical vapor deposition polysilicon reactor, the machine comprising a plurality of grinding wheels, the method comprising: providing a silicon seed rod having a first end and an opposing second end; grinding a v-shaped profile into an end face of the first end of the silicon seed rod with one of the plurality of grinding wheels; and grinding a conical profile in the second end of the silicon seed rod with another of the plurality of grinding wheels.
地址 Novara IT