发明名称 |
Method for machining seed rods for use in a chemical vapor deposition polysilicon reactor |
摘要 |
A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels. |
申请公布号 |
US9102035(B2) |
申请公布日期 |
2015.08.11 |
申请号 |
US201213417792 |
申请日期 |
2012.03.12 |
申请人 |
MEMC Electronics Materials S.p.A. |
发明人 |
Bovo Rodolfo;Molino Paolo |
分类号 |
B24B49/12;B24B41/06;B24B1/00;B24B19/00;B24B7/16 |
主分类号 |
B24B49/12 |
代理机构 |
Armstrong Teasdale LLP |
代理人 |
Armstrong Teasdale LLP |
主权项 |
1. A method for machining a profile into a silicon seed rod using a machine, the silicon seed rod used in a chemical vapor deposition polysilicon reactor, the machine comprising a plurality of grinding wheels, the method comprising:
providing a silicon seed rod having a first end and an opposing second end; grinding a v-shaped profile into an end face of the first end of the silicon seed rod with one of the plurality of grinding wheels; and grinding a conical profile in the second end of the silicon seed rod with another of the plurality of grinding wheels. |
地址 |
Novara IT |