发明名称 AN EXHAUST DAMPER FOR SEMICONDUCTOR FACILITIES
摘要 <p>The present invention relates to an exhaust damper for semiconductor facilities. The exhaust damper for semiconductor facilities can prevent the movement of a blade through the control of a rotary operation unit by comprising: a damper housing wherein a gasket is integrally formed on both outer sides and a penetration hole is formed on the upper and lower sides; the blade which is installed by being inserted into the damper housing; a supporting bracket which is installed to be welded to the outer side of the damper housing and combines with an actuator; an installation bracket unit which is formed in a vertical direction of the supporting bracket and is made of a fixing bracket wherein an insertion hole corresponding to the penetration hole of the damper housing is formed in the inner side; the rotary operation unit in which one side is combined to the blade through the penetration hole and the other side is combined to a driving axis of the actuator through the insertion hole; a rotary unit which is integrally combined to the outer side of the damper housing and is made of a bearing unit to guide the rotation of the rotary operation unit; and a control unit to control the movement of the rotary operation unit by being connected and installed on the fixing bracket and the rotary operation unit.</p>
申请公布号 KR101542489(B1) 申请公布日期 2015.08.07
申请号 KR20150056835 申请日期 2015.04.22
申请人 SEBO MANUFACTURING ENG. & CONST. CO., LTD. 发明人 KIM, WOO YOUNG
分类号 H01L21/02 主分类号 H01L21/02
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