发明名称 |
AN EXHAUST DAMPER FOR SEMICONDUCTOR FACILITIES |
摘要 |
<p>The present invention relates to an exhaust damper for semiconductor facilities. The exhaust damper for semiconductor facilities can prevent the movement of a blade through the control of a rotary operation unit by comprising: a damper housing wherein a gasket is integrally formed on both outer sides and a penetration hole is formed on the upper and lower sides; the blade which is installed by being inserted into the damper housing; a supporting bracket which is installed to be welded to the outer side of the damper housing and combines with an actuator; an installation bracket unit which is formed in a vertical direction of the supporting bracket and is made of a fixing bracket wherein an insertion hole corresponding to the penetration hole of the damper housing is formed in the inner side; the rotary operation unit in which one side is combined to the blade through the penetration hole and the other side is combined to a driving axis of the actuator through the insertion hole; a rotary unit which is integrally combined to the outer side of the damper housing and is made of a bearing unit to guide the rotation of the rotary operation unit; and a control unit to control the movement of the rotary operation unit by being connected and installed on the fixing bracket and the rotary operation unit.</p> |
申请公布号 |
KR101542489(B1) |
申请公布日期 |
2015.08.07 |
申请号 |
KR20150056835 |
申请日期 |
2015.04.22 |
申请人 |
SEBO MANUFACTURING ENG. & CONST. CO., LTD. |
发明人 |
KIM, WOO YOUNG |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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