| 摘要 |
<p>The present invention relates to a method for processing diffraction diagrams from a piece of equipment which uses a focused-particle beam, said diffraction diagrams being generated by a particle-photon converter screen (1), which method comprises (i) selectively transmitting, to a photodetector and by means of a spatial light modulator (20), light emitted from said converter screen (1) in at least one selected region, said light having a photonic intensity which is representative of diffractive properties of the material in said selected region, (ii) detecting, by means of said photodetector, a photonic intensity which is representative of the light transmitted by said spatial light modulator (20), and (iii) programming said spatial light modulator (20) according to a filter diagram (DF) to produce a spatial filtering function for the light from said converter screen (1).</p> |
