Method and device for thermal insulation of micro-reactors

摘要

A method for manufacturing a micro-fluidic device (104) comprises:
- providing a semiconductor substrate (900) having a front side and a back side;
- providing at least one micro-reactor (105) in said semiconductor substrate (900);
- providing one or more micro-fluidic channels (101) in the front side of said semiconductor substrate (900), connected to said at least one micro-reactor (105);
- sealing said micro-fluidic channels (101) by bonding of a cover layer (903) to the front side of the semiconductor substrate (900); and
- thereafter, from the semiconductor backside, providing at least a partial etch for forming at least one through-substrate trench (100) surrounding said at least one micro-reactor (105) and the one or more micro-fluidic channels (101).