发明名称 |
Expanding device and method for manufacturing components |
摘要 |
In an expanding device that can more effectively expand an adhesive tape in its wafer-attached region and can pick up components on the adhesive tape with high accuracy, a central first portion of an adhesive tape, including a portion with a wafer attached thereto, is laid on a top surface of a heating table, a non-heated ring is disposed to surround an outer peripheral edge of the heating table, a heat insulation is laid on an upper surface of the non-heated ring, a second portion of the adhesive tape located outwardly of the first portion thereof is located on or above the insulation, a third portion of the adhesive tape located outwardly of the second portion is held by a holder, and the holder is movable up and down relative to the heating table and the non-heated ring by a drive unit. |
申请公布号 |
US9101085(B2) |
申请公布日期 |
2015.08.04 |
申请号 |
US201213707644 |
申请日期 |
2012.12.07 |
申请人 |
Murata Manufacturing Co., Ltd. |
发明人 |
Mizukami Miyuki;Yamada Naohiro |
分类号 |
H05K13/00;H01L21/67;H01L21/02;H01L21/683 |
主分类号 |
H05K13/00 |
代理机构 |
Keating & Bennett, LLP |
代理人 |
Keating & Bennett, LLP |
主权项 |
1. An expanding device comprising:
a heating table on a top surface of which a central first portion of an adhesive tape, including a portion with a wafer attached thereto, is provided; a non-heated ring arranged to surround an outer peripheral edge of the heating table; a heat insulation which is provided on an upper surface of the non-heated ring and on which a second portion of the adhesive tape located outwardly of the first portion thereof is directly or indirectly provided; a holder arranged to hold a third portion of the adhesive tape located outwardly of the second portion; and a drive unit arranged to move the heating table and the non-heated ring up and down relative to the holder to expand the adhesive tape. |
地址 |
Kyoto JP |