发明名称 Expanding device and method for manufacturing components
摘要 In an expanding device that can more effectively expand an adhesive tape in its wafer-attached region and can pick up components on the adhesive tape with high accuracy, a central first portion of an adhesive tape, including a portion with a wafer attached thereto, is laid on a top surface of a heating table, a non-heated ring is disposed to surround an outer peripheral edge of the heating table, a heat insulation is laid on an upper surface of the non-heated ring, a second portion of the adhesive tape located outwardly of the first portion thereof is located on or above the insulation, a third portion of the adhesive tape located outwardly of the second portion is held by a holder, and the holder is movable up and down relative to the heating table and the non-heated ring by a drive unit.
申请公布号 US9101085(B2) 申请公布日期 2015.08.04
申请号 US201213707644 申请日期 2012.12.07
申请人 Murata Manufacturing Co., Ltd. 发明人 Mizukami Miyuki;Yamada Naohiro
分类号 H05K13/00;H01L21/67;H01L21/02;H01L21/683 主分类号 H05K13/00
代理机构 Keating & Bennett, LLP 代理人 Keating & Bennett, LLP
主权项 1. An expanding device comprising: a heating table on a top surface of which a central first portion of an adhesive tape, including a portion with a wafer attached thereto, is provided; a non-heated ring arranged to surround an outer peripheral edge of the heating table; a heat insulation which is provided on an upper surface of the non-heated ring and on which a second portion of the adhesive tape located outwardly of the first portion thereof is directly or indirectly provided; a holder arranged to hold a third portion of the adhesive tape located outwardly of the second portion; and a drive unit arranged to move the heating table and the non-heated ring up and down relative to the holder to expand the adhesive tape.
地址 Kyoto JP