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发明名称
等离子体处理腔室的清洁方法
摘要
本发明提供了一种等离子体处理腔室的清洁方法,其中,通过等离子体处理腔室的气体喷淋头向腔室内部通入清洁气体,然后施加射频能量将清洁气体激发成等离子体对腔室内部进行清洁,在所述等离子体处理腔室的冷却气体供应管道内持续供应冷却气体至清洁结束。本发明提供的等离子体处理腔室的清洁方法,能够在清洁的过程中保证氦气供应管道不会受到污染,不会因为清洁过程而在管道内壁沉积污染物,甚至被堵塞。
申请公布号
TW201529880
申请公布日期
2015.08.01
申请号
TW103142801
申请日期
2014.12.09
申请人
中微半导体设备(上海)有限公司
发明人
周军;李江;孙海辉
分类号
C23C16/44(2006.01);C23C16/52(2006.01)
主分类号
C23C16/44(2006.01)
代理机构
代理人
黄信嘉谢炜勇
主权项
地址
中国大陆 CN
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