| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas laser system which allows for resumption of discharge in a short time, when power supply interrupted by electric outage, or the like, is recovered.SOLUTION: A gas laser system includes a laser oscillator 1 having a gas passage 2 through which laser gas circulates, and gas supply and discharge sections 8, 9 for supplying laser gas to the gas passage 2 and discharging laser gas therefrom, a power supply 20 for supplying power to the laser oscillator 1, a power storage section 21 for storing power supplied from the power supply 20, a power drop detector 22 for detecting the power supplied from the power supply 20 lowering below a power value Wa with which the laser oscillator 1 can operate normally, and a control section 10 for controlling the gas supply and discharge sections 8, 9 so as to bring the gas passage 2 into sealed state, when power drop is detected by the power drop detector 22, by using the power stored in the power storage section 21.</p> |
