发明名称 |
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-ANGLE X-RAY REFLECTANCE SCATTEROMETRY (XRS) |
摘要 |
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam. |
申请公布号 |
WO2015112444(A1) |
申请公布日期 |
2015.07.30 |
申请号 |
WO2015US11753 |
申请日期 |
2015.01.16 |
申请人 |
REVERA, INCORPORATED |
发明人 |
POIS, HEATH A.;REED, DAVID A.;SCHUELER, BRUNO W.;SMEDT, RODNEY;FANTON, JEFFREY T. |
分类号 |
G01B15/00;G01N23/223;H01L21/66 |
主分类号 |
G01B15/00 |
代理机构 |
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主权项 |
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地址 |
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