Laser pulse generation method and apparatus

摘要

A method and apparatus of generating a laser pulse of a desired energy and micro-machining a substrate using the laser pulse. A beam of light is provided from a laser source. The beam is directed via a modulator to produce an output laser pulse with a portion of the laser pulse being used to determine the energy of the laser pulse. The modulator is controlled so as to switch off the output laser pulse when the determined energy of the output laser pulse reaches a threshold value. The output laser pulse is steered to a substrate for micro-machining.

主权项

1. A method of generating a laser pulse of a desired energy, the method comprising the steps of:
a) providing a beam of light from a laser source; b) directing the beam of light via a modulator, the modulator operable to modulate the beam to produce an output laser pulse; c) directing a portion of the output laser pulse to a detector and thereby determining the energy of the output laser pulse; and d) controlling the modulator so as to switch off the output laser pulse when the determined energy of the output laser pulse reaches a threshold value.