发明名称 HEAT TREATMENT DEVICE AND LAMP CONTROL METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a heat treatment device and a lamp control method with which it is possible to reliably execute the heat treatment by a halogen lamp of an object to be treated, at an expected temperature.SOLUTION: A heat treatment device according to the present invention is created by including a halogen lamp for heating the object to be treated, a radiation thermometer for measurement the temperature of the object to be treated, and a control unit for controlling the input voltage of the halogen lamp, the heat treatment device being characterized in that the control unit has a storage unit for storing a background correction amount for a value measured by the radiation thermometer that is set in correspondence to the input voltage of the halogen lamp at the time the halogen lamp is turned on.</p>
申请公布号 JP2015135313(A) 申请公布日期 2015.07.27
申请号 JP20140007589 申请日期 2014.01.20
申请人 USHIO INC 发明人 TANIGUCHI SHINJI
分类号 G01J5/00;C21D1/34;G01J5/10;H01L21/26;H01L21/66 主分类号 G01J5/00
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