发明名称 COMPOUND FOR ENHANCING GENERATION OF CHEMICAL SPECIES
摘要 PROBLEM TO BE SOLVED: To provide a reagent that absorbs light of a wavelength equal to or longer than 220 nm, sensitizes a compound, and enhances the generation of a first chemical species from the compound.SOLUTION: Disclosed are a reagent (photosensitizer) that enhances acid generation of a photoacid generator in a composition containing the reagent by exposure to electromagnetic waves or particle beams, and a composition containing the reagent.
申请公布号 JP2015134904(A) 申请公布日期 2015.07.27
申请号 JP20140233141 申请日期 2014.11.17
申请人 TOYO GOSEI KOGYO KK 发明人 ENOMOTO SATOSHI;SUGA YUSUKE
分类号 C09K3/00;C07C43/215;C07C69/54;C07D317/22;C08F2/50;C08F8/00;C08F222/20;G03F7/004;G03F7/039;H01L21/027;H01L21/312 主分类号 C09K3/00
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