| 发明名称 |
METHOD FOR MANUFACTURING SUPPORT FRAME FOR PELLICLE, SUPPORT FRAME FOR PELLICLE, AND PELLICLE |
| 摘要 |
Provided are a method of manufacturing a support frame for a pellicle, capable of forming a sufficiently blackened anodic oxide film through anodic oxidation treatment and providing a support frame for a pellicle industrially inexpensively with ease, a support frame for a pellicle obtained by the method, and a pellicle. Specifically, provided are a method of manufacturing a support frame for a pellicle to be used as a pellicle including an optical thin film, the method including: annealing an aluminum material formed of an Al—Zn—Mg based aluminum alloy; and subjecting the aluminum material to anodic oxidation treatment in an alkaline solution to form an anodic oxide film having a lightness index L* value of 40 or less, a support frame for a pellicle obtained by the method, and a pellicle including the support frame for a pellicle and an optical thin film. |
| 申请公布号 |
US2015205195(A1) |
申请公布日期 |
2015.07.23 |
| 申请号 |
US201314415416 |
申请日期 |
2013.07.11 |
| 申请人 |
NIPPON LIGHT METAL COMPANY, LTD. |
发明人 |
Yamaguchi Takayuki;Taguchi Yoshihiro;Iizuka Akira |
| 分类号 |
G03F1/64;C25D11/16 |
主分类号 |
G03F1/64 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a support frame for a pellicle to be used as a pellicle comprising an optical thin film,
the method comprising: annealing an aluminum material obtained by subjecting an Al—Zn—Mg based aluminum alloy to solution treatment or an aluminum material obtained by subjecting an Al—Zn—Mg based aluminum alloy to solution treatment and then aging treatment; and subjecting the aluminum material to anodic oxidation treatment in an alkaline solution to form an anodic oxide film having a lightness index L* value of 40 or less. |
| 地址 |
Tokyo JP |
