发明名称 |
Method, System, and Device for Delivery of High Purity Hydrogen Peroxide |
摘要 |
A method and chemical delivery system are provided. The method includes providing a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The method further includes contacting a carrier gas or vacuum with the vapor phase and delivering a gas stream comprising hydrogen peroxide to a critical process or application. The chemical delivery system includes a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The system further includes a carrier gas or vacuum in fluid contact with the vapor phase and an apparatus for delivering a gas stream comprising at least one component of the hydrogen peroxide solution to a critical process or application. |
申请公布号 |
US2015190736(A1) |
申请公布日期 |
2015.07.09 |
申请号 |
US201314415035 |
申请日期 |
2013.03.14 |
申请人 |
RASIRC, INC. |
发明人 |
Alvarez, JR. Daniel;Heinlein Edward;Holmes Russell J.;Spiegelman Jeffrey J. |
分类号 |
B01D19/00 |
主分类号 |
B01D19/00 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method comprising:
(a) providing a non-aqueous hydrogen peroxide solution having a vapor phase separated from the non-aqueous hydrogen peroxide solution by a membrane; (b) contacting a carrier gas or vacuum with the vapor phase; and (c) delivering a gas stream comprising hydrogen peroxide to a critical process or application. |
地址 |
San Diego CA US |