| 摘要 |
<p>The present invention is to provide a flexible substrate processing device and a flexible substrate processing method using the same. The flexible substrate processing device comprises: a supply roll to supply a flexible substrate which is processed in a processing chamber; a collection roll to collect the processed flexible substrate; a gas supply unit to supply processing gas within the processing chamber; a rotation stage which is installed inside the processing chamber to be able to rotate and support the flexible substrate which is continuously provided while a placing area formed along the outer circumference surface is rotated; a cooling unit which forms a flow path inside the rotation stage and cools the flexible substrate by circulation of a refrigerant to the flow path; a heating member which is located inside the cooling unit and transfers heat to the flexible substrate; and a plasma generation unit having an external electrode which is installed in the rotation stage along a circumference direction or is formed in a curved surface facing the placing area of the rotation stage. The heating member is fixated and arranged inside the rotation stage. The cooling unit can perform a relative rotary motion for the heating member. According to the present invention, productivity can be improved by using a roll-to-toll mode and damage by foreign substances can be prevented by performing the transfer and processing in a space in which a flexible substrate processing is performed at the same time. Therefore, the quality of a product can be improved.</p> |
