SUBSTRATE HOLDING DEVICE AND SUBSTRATE HOLDING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate holding device and a substrate holding method capable of surely holding a substrate while inhibiting the substrate from being deformed.SOLUTION: A substrate holding device 1A includes a chuck part 2 for functioning as a holding part to hold a substrate W by negative pressure generated by swirling flow. This chuck part 2 includes: a recess shaped internal chamber 11 in which the swirling flow is generated; gas jet passages 21b and 21c which jet gas in the internal chamber 11; and a pillar 12 of a columnar shape provided on the bottom surface of the internal chamber 11.