| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thin-film capacitor which prevents dielectric breakdown due to mechanical stress and thus has high durability.SOLUTION: The thin-film capacitor includes a lower electrode 2, a dielectric layer 3 provided on the lower electrode, and an upper electrode formed on the dielectric layer and also includes a leak valve particle 5 and an insulator patch material 6 on that surface side of the dielectric layer which faces the upper electrode. The insulator patch material is in contact with both the dielectric layer and the leak valve particle. The leak valve particle is selected from materials of a metal particle, a ceramic particle, and an organic particle. The insulator patch material is composed of an inorganic or organic insulator material.</p> |
