| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic heater element, capable of suppressing the deterioration of heat resistance and oxidation resistance.SOLUTION: A method for manufacturing a ceramic heater element 18, capable of sintering a calcined body 18b while compressing it by hot pressing comprises: the lamination step of alternately laminating a press die 8 made of graphite with a plurality of calcined bodies 18b in a pressing direction HP to form a laminate 8a; the surrounding step of surrounding the laminate 8a by a cylindrical vessel 5 formed of graphite from an orthogonal direction HC orthogonal to the pressing direction HP; and the sintering step of heating the laminate 8a together with the vessel 5 while compressing it in the pressing direction HP to sinter a calcined body 18b. In the surrounding step, a heat resistance sheet material 50 made of graphite and flexible is positioned between the periphery of the laminate 8a in the orthogonal direction HC and the vessel 5. In the sintering step, the calcined body 18b projected outside from the press die 8 in the orthogonal direction HC by compressing the laminate 8a is contacted with the heat resistance sheet material 50. |
