真空泵及其运转方法;VACUUM PUMP AND OPERATING METHOD OF THE VACUUM PUMP

摘要

本发明提供一种可减少错误发生所引起的运转停止之频率的真空泵。;本发明之真空泵具备：泵模组1，系将气体排气；电动机2，系驱动泵模组1；逆变器装置5，系将可变频率的交流电力供应至电动机2；以及控制装置7，系控制逆变器装置5。逆变器装置5在发生过电压或过电流所引起的错误时便停止自身的运转，控制装置7是只要错误的发生满足预定条件，便使逆变器装置5再度启动。;The vacuum pump of this invention includes: a pump module 1 for exhausting air; a motor 2 for driving the pump module 1; an inverter device 5 for supplying a variable alternative current to the motor 2; and a control device 7 for controlling the inverter device 5. The inverter device 5 shutdowns itself when errors caused by overloading of current or voltage occurs. The control device 7 re-starts the inverter device 5 while an occurrence of the error satisfies a predefined condition.