发明名称 気体感応型の半導体装置
摘要 <p>A gas-sensitive semiconductor device having a semiconductive channel (10) which is delimited by a first (12) and a second (14) channel electrode, and having a gate electrode (16) which is associated with the channel and which cooperates with the channel in such a way that a change in conductivity of the channel (10) occurs as a response to an action of a gas. The gate electrode (16) and/or a gate insulation layer (20) which insulates the gate electrode from the channel, and/or a gate stack layer (18) which may be provided between the gate electrode and the channel have/has two surface sections (22, 24) which differ in their sensitivity to gases.</p>
申请公布号 JP5743478(B2) 申请公布日期 2015.07.01
申请号 JP20100227225 申请日期 2010.10.07
申请人 发明人
分类号 G01N27/00;G01N27/04;H01L21/336;H01L29/78 主分类号 G01N27/00
代理机构 代理人
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