Substrate inspection apparatus and substrate inspection method

摘要

A substrate inspection apparatus for detecting a condition of an EBR line at a substrate edge, comprising a turntable for rotating a substrate having a film coated thereon, a light irradiator and a photoelectric converter that receives specularly reflected light from the substrate and outputs a captured image signal. A two-dimensional image is generated by adding detection values of electrical signals corresponding to one radial scan from a center of the substrate for one turn of a rotator, and a changing point is judged using a judgment band set along one direction of the two-dimensional image.

主权项

1. A substrate inspection apparatus, comprising:
a rotator that holds and rotates a substrate having a coating film formed on a surface; a light irradiator that irradiates light to the surface of the substrate; photoelectric converter that receives specularly reflected light from the surface of the substrate and captures an image of a scanning line having at least a length of the radius of the substrate in a main scanning direction parallel to a radial direction of the substrate from a center of rotation of the substrate; and an image processor that generates a two-dimensional image by arranging images captured by the photoelectric converter during one turn of the substrate in a sub scanning direction perpendicular to the main scanning direction and judges whether an edge line of the coating film is good or bad using a judgment band set in parallel to the sub scanning direction for the two-dimensional image, wherein the image processor includes: an edge detector that divides an image included in the judgment band out of the two-dimensional image into a plurality of block images in the sub scanning direction and detects whether or not each block image includes the edge of the coating film; and a good and bad judgment unit that judges whether the edge line of the coating film is good or bad based on the number of the edge-detected block images by the edge detector.