| 摘要 |
PROBLEM TO BE SOLVED: To transport a plate-like workpiece together with a chuck table while holding the plate-like workpiece on the chuck table. ! SOLUTION: A transport apparatus includes: first connection parts 12a-12c disposed on a connection surface 102 and connected to a suction source; second connection parts 13a-13c disposed on any other surface than the connection surface 102 and connected to the suction source; a common suction path 14 connected to a sucking and holding part 11 for sucking and holding the plate-like workpiece; a first suction path 15a communicating the common suction path 14 and the first connection part 12a; a second suction path 16a communicating the common suction path 14 and the second connection part 13a; a first check valve 17a disconnecting the first suction path 15a; a second check valve 18a disconnecting the second suction path 16a; and sucked and held part 19 disposed in any other part than the sucking and holding part 11, sucked and held by the transport apparatus trans |
