FORMATION OF AN ALIGNMENT FILM FOR A LIQUID CRYSTAL ON A SUBSTRATE

摘要

A method for forming an alignment film for a liquid crystal on a substrate and an associated at least one structure. The substrate is moved in a first direction. A target is disposed on the first surface side of the substrate. The ion beam is propagated from an ion source toward the substrate and impinges on a sputtering surface of the target, which sputters a material of the target and results in sputtered particles of the material being emitted from the sputtering surface of the target and deposited on the first surface side of the substrate to form (i) a sputtering film on the first surface side of the substrate and (ii) an alignment film having an orientation and being disposed on the sputtering film and on the entire surface of the substrate. The alignment film aligns molecules of the liquid crystal in a predetermined direction.

主权项

1. A method for forming an alignment film for a liquid crystal on a substrate, said method comprising:
moving the substrate linearly in a first direction opposite to a second direction in which a normal direction of a sputtering surface of a target is projected on a first surface side of the substrate, said sputtering surface of the target disposed on the first surface side of the substrate; and propagating an ion beam from an ion source toward the substrate and impinging on the sputtering surface of the target, which sputters a material of the target and results in sputtered particles of the material being emitted from the sputtering surface of the target and deposited on the first surface side of the substrate to form (i) a sputtering film on the first surface side of the substrate and (ii) an alignment film on the sputtering film and on the entire surface of the substrate, wherein the movement of the substrate linearly in the first direction, the formation of the sputtering film, and the formation of the alignment film occur simultaneously, which results in the sputtering film having an orientation, and wherein the alignment film aligns molecules of the liquid crystal in a predetermined direction.