| 摘要 |
本发明系关于用于特征化一样本之探针配置，该探针配置包括：˙一固持器(707)；˙一悬臂(704)，其具有附接至该固持器之一底端及远离该固持器延伸之一远端；˙一尖端(702)，其配置在该悬臂之该远端附近，该尖端具有由一底平面、一侧表面及一顶点界定之一形状，该侧表面自该底平面向上延伸至该顶点；其中该尖端包括一钻石体(110、710)及覆盖至少一顶点区域(108、708)之一钻石层(103、703)，该顶点区域系该实心钻石体(110、710)之该侧表面之一部分，该部分开始于且包含该顶点。本发明同样系关于一种用于制造根据本发明之一探针配置之方法。 The present invention is related to probe configuration for characterizing a sample, the probe configuration comprising: ˙; ˙; ˙; wherein the tip comprises a diamond body (110,710) and a diamond layer (103,703) covering at least an apex region (108,708), the apex region being a part of the side surface of the solid diamond body (110,710) that starts from and includes the apex. The invention is equally related to a method for fabricating a probe configuration according to the invention. |
