| 发明名称 |
APPARATUS FOR SELF-CENTERING PRE-HEAT RING |
| 摘要 |
Embodiments described herein generally relate to an apparatus for aligning a preheat member. In one embodiment, an alignment assembly is provided for a processing chamber. The alignment assembly includes a lower liner, a preheat member; an alignment mechanism formed on a bottom surface of the preheat member; and an elongated groove formed in a top surface of the lower liner and configured to engage with the alignment mechanism. |
| 申请公布号 |
US2015162230(A1) |
申请公布日期 |
2015.06.11 |
| 申请号 |
US201414520957 |
申请日期 |
2014.10.22 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BAUTISTA Kevin Joseph;COLLINS Richard O.;MYO Nyi O. |
| 分类号 |
H01L21/68;C30B25/10;C30B25/12;C30B25/08 |
主分类号 |
H01L21/68 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An alignment assembly for a processing chamber, comprising:
a lower liner having a lip; a preheat member having a bottom surface; an alignment mechanism extending from the bottom surface of the preheat member; and an elongated groove formed in a top surface of the lip and configured to accept the alignment mechanism. |
| 地址 |
Santa Clara CA US |
