发明名称 セラミック部材
摘要 <p>Provided is a ceramic member in which the difference in thermal expansion coefficient between an insulating ceramic material and an electrically conductive ceramic material is extremely small and therefore any mismatch caused in association with this difference in thermal expansion coefficient does not occur, and which does not undergo any failure such as breakage, cracking, detachment or destruction. The ceramic member (1) includes an electrically conductive ceramic material (2) which contains yttrium oxide as the main component and additionally contains a fibrous electrically conductive substance such as carbon nanotubes in an amount of 0.1 to 3 vol % inclusive and an insulation ceramic material (3) which contains yttrium oxide as the main component, wherein the electrically conductive ceramic material (2) and the insulation ceramic material (3) are adhered to each other in an integrated manner through an adhesive layer (4) which includes an inorganic adhesive material.</p>
申请公布号 JP5732798(B2) 申请公布日期 2015.06.10
申请号 JP20100218657 申请日期 2010.09.29
申请人 发明人
分类号 C04B37/00;C04B35/50;C23C16/458;H01L21/3065 主分类号 C04B37/00
代理机构 代理人
主权项
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