| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem in which, since a movement of dust in an ongoing direction etc. can hardly be determined, behavior of the dust cannot be grasped and suitable countermeasure means is thereby hardly taken. ! SOLUTION: Two or more parallel sheet-like light beams are generated and observed through a camera. It is determined that a case in which scattered light is observed twice through a camera at a predetermined image position is caused by a movement of one dust piece, and then the movement of the dust in a specific direction can be detected. Consequently, dust moving in the specific direction, for example, falling dust, can be evaluated. ! COPYRIGHT: (C)2015,JPO&INPIT |
