| 摘要 |
<p>The method involves detecting a first direction (110) of orientation of metal grains along trenches in a substrate. A second direction (111) of orientation of the grains in a path vertical to the trenches is detected. A third direction of channeling of ions in a mesh of the metal is detected. Directions of orientation of ionic implantation beam in an invasion layer are detected by scalar multiplication of first and third vectors and second and third vectors, where the vectors relative to respective directions. The invasion layer is implanted by an ion beam based on preset beam orientations.</p> |
