发明名称 WIRE CLAMP WITH PIEZOELECTRIC ACTUATOR AND METHOD AND APPARATUS FOR APPLYING A PRELOAD FORCE TO THE PIEZOELECTRIC ACTUATOR
摘要 Disclosed is a wire clamp, comprising: a clamp body; a pair of arms coupled to the clamp body; and a piezoelectric actuator having a longitudinal axis extending between a first end and a second end, the actuator being coupled to the pair of arms at the first end and to the clamp body at the second end. The second end of the actuator is coupled to the clamp body by a preload mechanism for applying a preload force along the longitudinal axis, and the preload mechanism comprises at least one wedge having an inclined surface which is slidable over a mating inclined surface. Also disclosed is a method of applying a preload force to a piezoelectric actuator of a wire clamp, as well as a jig for applying a preload force to a piezoelectric actuator of a wire clamp.
申请公布号 KR20150056057(A) 申请公布日期 2015.05.22
申请号 KR20140157877 申请日期 2014.11.13
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD. 发明人 ZHANG YUE;CHEN CHONG HAO;LIN ZHENG YU
分类号 H01L21/60;H01L23/49;H01L41/08;H01L41/22 主分类号 H01L21/60
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