| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide: a vapor deposition material which is suitable for the deposition of a thin film having excellent transparency and gas barrier properties; a thin film sheet provided with the thin film; and a laminated sheet. <P>SOLUTION: In the vapor deposition material made by mixing first oxide powder and second oxide powder, the first oxide powder is composed of MgO powder, purity of the first oxide in the first oxide powder is≥98%, the second oxide powder is composed of a powdery mixture of CaO and ZnO, and purity of the second oxide in the second oxide powder is≥98%. The vapor deposition material is composed of a pellet comprising first oxide particles and second oxide particles, the molar ratio between the first oxide and the second oxide in the vapor deposition material is (5 to 90):(95 to 10), and also, basicity of the pellet is≥0.1. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
