| 摘要 |
A piezoelectric pump (1) includes a leaf spring (15). The leaf spring (15) includes a disc portion (24) constituting an actuator (3), an outer frame portion (23) constituting a housing (2), and an elastic support portion (4). The actuator (3) flexurally vibrates from a center of a principal surface thereof to an outer periphery thereof. The elastic support portion (4) includes a beam portion (25) and connection portions (26, 27, 28) and elastically supports the disc portion (24) to the outer frame portion (23). The beam portion (25) extends in a gap between the disc portion (24) and the outer frame portion (23) in a direction along an outer periphery of the disc portion (24). The connection portion (26) connects the beam portion (25) to the disc portion (24). The connection portions (27, 28) are provided in positions offset from the connection portion (26) and connect the beam portion (25) to the outer frame portion (23). |
