发明名称 INLET FOR SCRUBBER
摘要 The purpose of the present invention is to provide an inlet of a new structure which has long lifespan without replacement by minimizing the clogging of the inlet of a wet-type scrubber. The present invention according to the purpose includes: a second cleaning solution buffer of a hollow pillar type, which is a flow path for gas and a cleaning solution; and a first cleaning solution buffer which is mounted on the upper end of the second cleaning solution buffer and includes a nitrogen or inert gas inlet. A cleaning inlet formed in the first cleaning solution buffer includes two inlets which face each other, and supplies the cleaning solution to a tangential direction to the wall surface of the second cleaning solution buffer so the cleaning solution rotates along the wall surface of the second cleaning solution buffer. The two cleaning solution inlets inject the cleaning solution to opposite directions. A gas curtain such as rotary current and nitrogen prevents the generation of powder due to the contact of the cleaning solution and harmful gas.
申请公布号 KR20150054608(A) 申请公布日期 2015.05.20
申请号 KR20130149665 申请日期 2013.12.04
申请人 MAT PLUS CO., LTD. 发明人 KIM, DONG SOO;KHOR WOOI KEAT;LOOI CHIN SAN;OMAR MOHD HANIF;LEE YEN CHONG
分类号 H01L21/02 主分类号 H01L21/02
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