Semiconductor-on-insulator structure and method of fabricating the same

摘要

Methods for forming a layer of semiconductor material and a semiconductor-on-insulator structure are provided. A substrate including one or more devices or features formed therein is provided. A seed layer is bonded to the substrate, where the seed layer includes a crystalline semiconductor structure. A first portion of the seed layer that is adjacent to an interface between the seed layer and the substrate is amorphized. A second portion of the seed layer that is not adjacent to the interface is not amorphized and maintains the crystalline semiconductor structure. Dopant implantation is performed to form an N-type conductivity region or a P-type conductivity region in the first portion of the seed layer. A solid-phase epitaxial growth process is performed to crystallize the first portion of the seed layer. The SPE growth process uses the crystalline semiconductor structure of the second portion of the seed layer as a crystal template.

主权项

1. A method for forming a layer of semiconductor material, the method comprising:
providing a substrate including one or more devices or features formed therein; bonding a seed layer to the substrate, the seed layer including a crystalline semiconductor structure; amorphizing a first portion of the seed layer that is adjacent to an interface between the seed layer and the substrate, wherein a second portion of the seed layer that is not adjacent to the interface is not amorphized and maintains the crystalline semiconductor structure; performing dopant implantation to form an N-type conductivity region or a P-type conductivity region in the first portion of the seed layer; and after the dopant implantation, performing a solid-phase epitaxial (SPE) growth process to crystallize the first portion of the seed layer, the SPE growth process using the crystalline semiconductor structure of the second portion of the seed layer as a crystal template.