VIBRATION ELEMENT, MANUFACTURING METHOD OF THE SAME, PHYSICAL QUANTITY DETECTOR, ELECTRONIC APPARATUS AND MOVABLE BODY

摘要

PROBLEM TO BE SOLVED: To provide a vibration element having excellent characteristics.SOLUTION: A vibration element 100 includes: a vibration piece 1 having a base portion 10 and vibration arms 4 connected to the base portion 10; drive input electrodes 60 provided on the vibration arms 4 and input with a signal for driving the vibration arms 4; drive output electrodes 62 provided on the vibration arms 4 for outputting a signal on the basis of driving of the vibration arms 4; a detection output electrode 64a for outputting a signal on the basis of flexure of the vibration arms 4 due to Coriolis force; a first residual portion 20 and a second residual portion 22 formed by cutting off a first coupling portion and a second coupling portion coupling the base portion 10 and a supporting portion provided around the vibration piece 1; first wiring 70 provided on the first residual portion 20 and connected to the drive input electrodes 60; and second wiring 74a provided on the second residual portion 22 and connected to the detection output electrode 64a.