首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
MASS TRANSFER TOOL
摘要
캐리어 기판으로부터 마이크로 디바이스를 이송하기 위한 시스템 및 방법이 개시된다. 일 실시예에서, 대량 이송 기구는 관절형 이송 헤드 조립체, 캐리어 기판 홀더, 및 관절형 이송 헤드 조립체와 캐리어 기판 홀더 간의 공간적 관계를 조정하기 위한 구동기 조립체를 포함한다. 관절형 이송 헤드 조립체는 정전기 이송 헤드들의 어레이를 지지하는 정전기 전압원 접속부 및 기판을 포함할 수 있다.
申请公布号
KR20150052288(A)
申请公布日期
2015.05.13
申请号
KR20157008746
申请日期
2013.08.27
申请人
LUXVUE TECHNOLOGY CORPORATION
发明人
HIGGINSON JOHN A.;BIBL ANDREAS;ALBERTALLI DAVID
分类号
H01L21/677;B65G49/07
主分类号
H01L21/677
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Base station apparatus and terminal apparatus
Triggerless release aids and laser-equipped pneumatic training aid for safe drawing of the bowstring
Integrated semiconductor memory chip with presence detect data capability
Image input-output apparatus and method therefor
System and related interfaces supporting the processing of media content
Nitrile polymer vulcanizate and process for the production thereof
Latent catalyst
Active matrix pixel device construction method
Low voltage high performance semiconductor devices and methods
Semiconductor device and method for manufacturing the same
Semiconductor light emitting device and its manufacture
Axle module with axle shaft electronic management
Polishing head of chemical mechanical polishing apparatus and polishing method using the same
Polishing pad for use in chemical/mechanical planarization of semiconductor wafers having a transparent window for end-point determination and method of making
Gap seal between a nozzle and a mold component in an injection molding apparatus
Method for pretreating a substrate prior to application of a polymeric coat
System and methods for hermetic sealing of post media-filled MEMS package
Light irradiating unit
Method, system, and article of manufacture for increasing processor utilization
Method and apparatus for tilt detection in an information-recording medium
