Ion sources, systems and methods

摘要

Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

主权项

1. A method, comprising:
forming a tip of an ion source; providing an ion column; passing ions generated by the ion source through the ion column; emitting light from the tip of the ion source while forming the tip of the ion source; using a detector to detect at least a portion of the light emitted from the tip of the ion source while the ion source is being formed; obtaining an image of the tip of the ion source based on the detected light emitted from the tip of the ion source while the ion source was being formed; and using the detected light to determine one or more parameters for preparing the tip of the ion source.