| 摘要 |
An apparatus for processing a substrate of the present invention comprises an index unit; a process treating unit in which treatment rooms treating the substrate are arranged in layers; and a test unit arranged on an index module and the process treating unit. The test unit comprises: a first test chamber having a first test return robot, and a first test module which is arranged in the location in which the first test return robot can access, and performs a test process of a first item to substrates of a first purchasing among substrates treated in the process treating unit; and a second test chamber having a second test return robot, and a second test module which is arranged in the location in which the second test return robot can access, and performs a test process of a second item which is different with the first item to substrates of a second purchasing among substrates treated in the process treating unit. |
