| 摘要 |
A laser lift-off device eliminates baneful influence of various dust particles generated from a workpiece due to laser irradiation for the workpiece. A periphery of a carrier platform part (11) of a workpiece carrier platform (10) is provided with an annular wall part (21) consisting of an annular outer wall part (21b) and a top wall part (21a). The carrier platform part (11) is provided with outlets (12) used for connecting with exhaust mechanisms at a plurality of positions. The outlets (12) absorb the air in the annular wall part (21) through tubings connected with the exhaust mechanisms such as pumps, fans, and so on. By using the laser to radiate a workpiece (1), the dust particles ejected along with gas from an edge part of the workpiece (1) towards inner spaces (A) divided by the annular outer wall part (21b) and the top wall part (21a) are discharged from the outlets (12) provided on the carrier platform part (11) through flow of fluid towards the outlets (12). |
