INSPECTION APPARATUS, INSPECTION SYSTEM, INSPECTION METHOD OF SEMICONDUCTOR DEVICES, AND MANUFACTURING METHOD OF INSPECTED SEMICONDUCTOR DEVICES

摘要

An inspection apparatus for inspecting output signal of a semiconductor device is provided with a monitor device configured to sense a signal on the monitor line and a plurality of inspection circuits connected to the monitor line. Each inspection circuit is provided with a semiconductor device support allowing a semiconductor device to be set thereon and including a signal terminal to which a signal is input from the set semiconductor device, a first resistor connected between the signal terminal and the monitor line, a selector terminal, and a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side.

主权项

1. An inspection apparatus configured to inspect output signal of semiconductor devices, the inspection apparatus comprising:
a monitor line, a monitor device configured to sense a signal on the monitor line; and a plurality of inspection circuits connected to the monitor line, wherein each inspection circuit comprises: a semiconductor device support on which a semiconductor device is to be set, the semiconductor device support comprising a signal terminal to which a signal is input from the semiconductor device set on the semiconductor support; a first resistor connected between the signal terminal and the monitor line; a selector terminal; and a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side.