| 摘要 |
The present invention relates to a clamping fixture including a chuck (1) to lock a workpiece pallet (2) on the chuck. The chuck (1) includes a first centering member formed into a spigot (5) shape. A body (20) is formed on the workpiece pallet (2), and a centering disk (23) is fixated to the workpiece pallet (2). A second centering member is formed into a centering opening (24) shape on the centering disk (23). The centering spigot (5) of the workpiece pallet (2) is applied on the centering opening (24) of the workpiece pallet (2). The workpiece pallet (2) can be aligned in an X-direction and Y-direction toward the chuck (1). A sealing member assembly (7) is formed on the upper side of the chuck (1). A sealing disk (21) protruding in a radial direction more than the centering disk (23) is arranged between the centering disk (23) and the body (20) of the workpiece pallet (2). The portion protruding in a radial direction more than the centering disk (23) is in contact with a sealing member of the sealing member assembly (7) when clamping the workpiece pallet (2). |
