| 发明名称 | Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus | ||
| 摘要 | A piezoelectric element comprises a piezoelectric film which comprises perovskite type crystals at least including Pb, Ti, and Zr, and an electrode which is provided to the piezoelectric film. A diffraction peak position (2θ) of X-rays derived from a (100) plane of the piezoelectric film is from 21.89 to 21.97, and a half-peak width (2θ) of a (200) plane is from 0.30 to 0.50. | ||
| 申请公布号 | US9022530(B2) | 申请公布日期 | 2015.05.05 |
| 申请号 | US201213481355 | 申请日期 | 2012.05.25 |
| 申请人 | Seiko Epson Corporation | 发明人 | Ohashi Koji |
| 分类号 | B41J2/045;B41J2/14;B41J2/055;H01L41/08;H01L41/09;H01L41/187;H01L41/29;H01L41/318 | 主分类号 | B41J2/045 |
| 代理机构 | Workman Nydegger | 代理人 | Workman Nydegger |
| 主权项 | 1. A piezoelectric element comprising: a piezoelectric film which comprises perovskite type crystals at least including Pb, Ti, and Zr; and an electrode which is provided to the piezoelectric film, wherein a diffraction peak position (2θ) of X-rays derived from a (100) plane of the piezoelectric film is from 21.89 to 21.97, and a half-peak width (2θ) of a (200) plane is from 0.30 to 0.50. | ||
| 地址 | Tokyo JP | ||