| 摘要 |
<p>This invention relates to a mask assembly and a deposition apparatus. To be more specific, the invention relates to the mask assembly and the deposition apparatus intended to improve adhesion between a substrate and a mask, and expand the deposition area of the substrate. The mask assembly according to application of this invention comprises a substrate holder to embed, fix and support a substrate; a deposition unit with multiple patterning slits to form a pattern on the said substrate; a periphery unit placed on the exterior of the said deposition unit; an opening unit that is opened to cover deposition area corresponding to the said deposition unit; and a mask frame equipped with a support that is combined with the said periphery unit. The periphery unit has a substrate holder avoidance unit that is placed to face the said substrate holder.</p> |
